Tribological processes and its technological advances for MEMS applications – A review

Saravanakumar, N (2015) Tribological processes and its technological advances for MEMS applications – A review. International Journal of Applied Engineering Research, 10 (13). pp. 11232-11247.

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Abstract

This review summarizes recent advances in the area of tribology and the challenges to achieve a molecular level understanding of friction, wear and contact mechanics for micro-electromechanical systems (MEMS) applications. There are some areas in which future efforts are focused for tribological processes and finds excellent solution for significant improvements in MEMS technology.

Item Type: Article
Subjects: F Mechanical Engineering > Engineering Design
Divisions: Mechanical Engineering
Depositing User: Users 1 not found.
Date Deposited: 01 Mar 2024 05:13
Last Modified: 04 Mar 2024 08:07
URI: https://ir.psgitech.ac.in/id/eprint/86

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